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New spectrum plasma rf generator 3KW 13.56MHZ mks eni
NEW SPECTRUM PLASMA RF GENERATOR 3KW 13.56MHZ MKS ENI
ENI High-Frequency RF Power Generator for Plasma Applications
Input: 200-208-VAC, 20 Amp, 3-Phase, 50/60 Hz
Output: 3000 Watts / 3KW / 3000W of Power at 13.56MHZ
Water Cooled 1.5 GPM / 5.1 LPM Minimum 60 PSI / 414 KPa Maximum
System Includes ENi POD-25PIN-O4 Interface, Power Cable, Interface Cable, Product Manual, and other related accessories
Spectrum B3013 13.56MHz, 3kW RF Plasma Generator
3kW High-Frequency RF Power for Plasma Applications
photo - Spectrum B3013 13.56MHz, 3kW RF Plasma Generator
The Spectrum model B3013 has integrated auto-frequency tuning, thereby eliminating the need for a complex matching network.
The Spectrum RF Plasma Generator is used in Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), etching and other thin film applications during the manufacture of integrated circuits, photovoltaic devices, flat panel displays, optical media and industrial coatings.
High Repeatability for Consistent Process Performance
* Forward Power Accuracy of 1.0% of set point, tied to and transferable from NIST
* 500 sec response to power set point changes and process step transitions for improved uniformity
High Reliability Increases Uptime and Lowers CoO
* Improved thermal management and decreased power dissipation through the use of new, high efficiency power amplifier (PA)
* Push-pull resonant circuit topology lowers the voltages across the power transistors
* Ample power margin allows more forward power delivery and more strike voltage potential to bridge sub-optimal conditions with no process interruption
Worst phase forward power referenced to rating
Automatic; forward power limits typically 500 s after reverse power reaches the rated limit.
Remote Interface Connector
Standard: RS-232 Subminiature 9 pin Type DB9F; Versatile Monitor Interface.
Optional: External Remote Interface
External Remote Interface Dimensions (H x W x D)
1.4" x 5.6" x 3.7" (36mm x 142mm x 94mm)
External Remote Interface Weight
15-pin Analog, 25-pin Analog, DeviceNet , Profibus .
The Following Product information is from the MKS Website at: http:// /product/Product.aspx?ProductID=309
