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Lam research 200MM wafer poly etcher 4420


Lam Research 200mm Wafer Poly Etcher 4420
This Lam etcher tool is used surplus. The overall physical condition is decent, but there are signs of use and there may be some missing mass flow controllers. Control cards are included. The chamber has process residue.
Notice: This is a non-Copper tool.
* 208V, 30A, 50/60Hz, 3 , 5 wire



Lam research 200MM wafer poly etcher 4420