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> Eni oem-25A rf generator, 2500 w, 13.56 mhz
Eni oem-25A rf generator, 2500 w, 13.56 mhz
ENI OEM-25A RF Generator, 2500 W, 13.56 MHz
The ENI Power System Model OEM-25A Power Generator is an all solid state, water cooled, power source
expressly designed for use in gas plasma and sputtering applications. Completely self-contained, the OEM-
25A provides all of the control and monitoring functions needed in a state-of-the-art power generator. It will
provide a maximum of 2500 Watt into a 50 Ohm impedance.
Frequency Stability: .005% Maximum
RF Output Impedance: 50 Ohms
Maximum Power Output: More than 2500 Watt. Local control set to 2730
Watt max. Remote control set to 2730 Watt
Power Output Meter: 0 to 3000 Watt with an accuracy of 4% of full
scale. Forward and reverse power by switch
Power Fold back Protection: Automatic, occurs when reverse power reaches
600 Watt, or power amplifier current exceeds
Pulsed Operation: Rise time is less than 0.5 msec, RF output may
be controlled simultaneously for amplitude and
RF output Connector: Type HN . HN to N adapter provided.
External Input/Output: Amphenol Subminiature D type RFI
External RF On/Off Control: + 12-24 VDC to enable RF power (floating not
Forward RF Power: Adjustable, 250 W/V to 2500 W/V output power
indication. Factory set for 300 W/V.
Cooling: Water flow at 2.0 Gal/min. minimum. Cooling
water inlet and outlet are 1/4 female NPT.
Maximum cooling air temp. +40 degrees.
Weight System: 225 lbs., 102 kg
44.5CM X 43.2CM X 53.4CM (H x WQ x D)
