Reduce Scrapping and Smelting, Promote Component Reuse > Engine Powered
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> Sputtering machine - mat vac model 603
Sputtering machine - mat vac model 603
Mat-Vac 603 sputtering system (up to 300mm wafers)
* CTI 8 cryo pump equipped with diode sensor for remote cryo temperature read out
* CTI cryo pump cryo compressor and He cryo lines
* Lybold Trivac-D30A Mechanical vacuum roughing pump with exhaust filter
* Peiffer Vacuum Turbo-THM 260PC Loadlock Turbo pump with controller TCP-380
* Advanced Energy MDX 10 solid state DC Magnetron sputtering power supply
* Advanced energy RFG 3000 solid state RF power supplies
* Gate valve and throttle valve
* MKS gas delivery system with MKS 250, 247 gas controllers, MKS Baratron 127 and MKS 1159B mass flow controllers
* Granville Philips model 307 ionization gauge controller with set point module
* MRC type cathode assemblies
* RF power flex transmission lines and target boxes
* Hydraulic system for substrate exchange
* Interlock switches (vacuum, covers/panels)
* Remote control software and computer
