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Celerity unit ufc-8561C 8560 500CC NF3 flow controller


Celerity Unit UFC-8561C 8560 500CC NF3 Flow Controller
* Electrical Interface: 9 pin D-Sub
* Mounting: Downported (looks like "C" seal)
* 1% digital setpoint accuracy and <1 second response
* High reliability and repeatability
* Backwards-compatible to analog MFCs
* Enables on-site gas and range changes with no surrogate gas requirements
* Dramatically reduces inventory requirements
* Nine standard MFC part numbers cover 85% of all applications



Celerity unit ufc-8561C 8560 500CC NF3 flow controller