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Tylan fc-280S mass flow controller CH4 methane 2 slpm
TYLAN FC-280S MASS FLOW CONTROLLER CH4 METHANE 2 SLPM
Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC260 is a premium quality elastomer-sealed mass flow controllers and meter. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.
This unit has the following specifications:
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