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> New mks P6A digital mfc mass flow controller NF3 gas
New mks P6A digital mfc mass flow controller NF3 gas
NEW MKS P6A Digital MFC Mass Flow Controller NF3 Gas
* (1) New in package MKS P6A Digital MFC Mass Flow Controller[NF3- Nitrogen Triflouride(Part#: P6A-27812)]
* (1) MKS Certificate of Calibration Sheet
* Full Scale Flow Range: (N2 equivalent) 250 sccm
* Maximum Inlet Pressure: 150 psig(can not exceed pressure differential requirement across MFC)
* Normal Operating Pressure Differential: 10 to 5000 sccm; 10 to 40 psid (with atmospheric pressure at the MFC outlet) 10000 to 30000 sccm; 15 to 40 psid
* Control Range: 2% to 100% of F.S.
* Typical Accuracy: 1% of setpoint for >10 to 100% F.S., 0.2% of F.S. for 2 to 10% F.S.
* Repeatability: 0.3% of Reading
* Resolution: 0.1% of Reading
* Temperature Coefficients: Zero < 0.05% of F.S./ C, Span < 0.08% of Rdg./ C
* Inlet Pressure Coefficient: < 0.02% of Rdg./psi
* Typical Controller Settling Time: < 1.5 sec typical above 5% F.S. (per SEMI Guideline E-17-0600)
* Warm-up Time: < 30 min (to within 0.2% of F.S. of steady state performance)
* Normal Operating Temperature Range: 10 C to 50 C
* Storage Humidity: 0 to 95% Relative Humidity, non-condensing
* Storage Temperature: -20 to 65 C (-4 to 149 F)
* Pressure Display: 0 to 100 psia
* Pressure Readout Units: psia, kPA
* Pressure Accuracy: 1% of Reading
* Pressure Resolution: 0.1 psia
* Temperature Display: 0 to 100 C
* Temperature Readout Units: C
* Temperature Accuracy: 2 C
* Temperature Resolution: 0.1 C
* Fittings (compatible with): Swagelok 4 VCR , 1-1/8 surface mount (C-seal, W-seal)
* Display: 4 digits for value, 4 characters for unit
* Leak Integrity: External (scc/sec He) < 1 x 10-10, Through closed valve < 1.0% of F.S. at 25 psig inlet to atmosphere(To assure no flow-through, a separate positive shut-off valve is required.)
* Wetted Materials: Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy, KM-45, Inconel , 825 Incoloy
* Surface Finish: 5 inch average Ra
* Weight: less than 3 lbs (1.4kg)
* Input Voltage Required: Max. current at start-up (first 5 sec) +15 VDC ( 5%) @ 350 mA, Typical current at steady state +15 VDC ( 5%) @ 250 mA
* Set Point Command Signal: 0 to 5 VDC
* Flow Output Signal: 0 to 5 VDC
* Pressure Output: 0 to 10 VDC, 0 to 5 VDC, 4-20mA
* Connectors: 15-pin Type D , 9-pin Type D
* Electromagnetic Compatibilty: CE compliant to EMC Directive 2004/108/EC when used with an overall metal braided shielded cable, properly grounded at both ends
* Digital I/O (DeviceNet): Data Rate/Network Length Data Rate (user selectable), 125 Kbps, 500 m (1,640 ft.), 250 Kbps, 250 m (820 ft.), 500 Kbps, 100m (328 ft.)
* Level of Filtering: User software adjustable
* Digital Functions (flow): Select units: counts, slm, sccm, % of F.S., Remote Zero, Set/read flow rate, Flow totalizer and run hours, Valve soft start, Monitor MFC status - valve drive level and trip points (alarm for high flow, alarm for low flow, warning for high flow, warning for low flow), Overrange, Underange, Reset factory defaults, Report run time hours, Change user tags and device address, Device Identification Storage includes manufacturer information, model and serial number, original factory calibration, software and hardware revision numbers.
* Digital Functions (pressure): Alarm enable, Warning enable, Alarm settling time, Warning settling time, Alarm trip point high, Warning trip point high, Alarm trip point low, Warning trip point low, Zero adjust
* Digital Functions (temperature): Alarm enable, Warning enable, Alarm settling time, Warning settling time, Alarm trip point high, Warning trip point high, Alarm trip point low, Warning trip point low, Zero adjust
* Data Rate Switch: 4 positions: 125, 250, 500K, PGM (programmable over the network)
* MAC ID Switches: 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
* Input Power 11: to 25 VDC per DeviceNet specification (@ <3.5 watts)
* Network Size: Up to 64 nodes
* Network Topology: Linear (trunkline/dropline) power and signal on same network cable
* Visual Communication Indicators: LED network status (green/red), LED module status (green/red)
