Reduce Scrapping and Smelting, Promote Component Reuse > Electric Powered
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> DuPage County
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> Microwave plasma source assy, for gasonics/novellus
Microwave plasma source assy, for gasonics/novellus
Microwave Downstream Plasma Source Assembly, with:
* National Mod. NL 10250-17 magnetron tube
* AGL Mod. WR340 power detector assy (power detector)
* Philips Mod. 2(***) 163 02101 circulator
* Part Number 95-3293 waveguide/tuner assy
* Downstream Plasma Source with mounting flange (unmarked)
* PEP 3600 Microwave Power supply, Part No. 95-2992, Output Freq. 2.45GHz, 0-1800W, 208VAC/1Ph/50/60Hz/25A, 0-10VDC control signal, 19" rack mount
* No cables or manuals are included
Packing charge: Domestic USA palletizing $85, Crating USA or International $225
More detailed pictures are available upon request.
