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Novellus varian inova M2000 M2I abs encoder wheel


Brand New still packaged. This is the lower arm abs encoder wheel sensor. Used on Varian / Novellus m2000, m2i and Inova systems.
We have a large inventory of Novellus/Varian m2000 m2i Inova and Inova xT parts available. We also have 15 years of in-depth factory trained experience servicing Novellus and Varian 200mm and 300mm PVD CVD HDP PLT and offer discount service. Contact Dan at dan.****@dhctec.com or (***) 581-2734 for inquiries.



Novellus varian inova M2000 M2I abs encoder wheel