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> Used zygo zmi 2002 dual axis measurement board 6U vme
Used zygo zmi 2002 dual axis measurement board 6U vme
USED ZYGO ZMI 2002 DUAL AXIS MEASUREMENT BOARD 6U VME
Qty 1 USED PULLED ZYGO ZMI 2002 DUAL AXIS MEASUREMENT BOARD
The Zygo ZMI 2002 6U VME Measurement board is the dual axis version used in the ZMI 2000 Laser Measurement system. The ZMI 2002 board can be used with either the 7712 or the 7702 laser heads.
Zygo is a world-class interferometric metrology company producing world-class laser systems. The ZMI 2000 system is the industries top performing Displacement Measuring Interferometer (DMI) System providing the highest resolution, velocity, and lowest data age uncertainty for real time position control. These systems are used in the most demanding real time position control applications:
Lithography tools (optical steppers, scanners, e-beam and laser mask writers)
Mask, wafer, and LCD inspection and measurement tools
Process equipment, memory repair tools
More information on the ZMI 2000 Measurement System - .pdf format
