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> Brooks fabexpress efem w/ wafer handler & 2 load ports
Brooks fabexpress efem w/ wafer handler & 2 load ports
Brooks FabExpress EFEM w/ Wafer Handler & 2 Load Ports
* FabExpress FX 2000 EFEM with spaces for TWO load ports 003-1000-89
* Series 8 Robot Controller 002-6400-27
* Robot Teach Pendant XPTN30R2-1-ES-BROOKS2
* 2pcs. BOLTS Load Port Modules 002-7200-21
* InLigner Wafer Aligner 002-7391-10
* 2pcs. Devicenet Interfaces 108378
* Devicenet Interface 101905
* CleanFlow Filter Fan Unit 2000FFU 105739
* Keyence Light Curtain SL-C16H
* Arista Industrial Touchscreen LCD Monitor ADM-1815BP
* Keytronic keyboard with trackball
The FabExpress (FX) atmospheric system is a bridge system designed to simultaneously handle 200mm and 300mm wafers. It is optimized with the Brooks Reliance robotics automation component set (robot and aligner) and the Brooks family of Load Port Modules qualified by 300mm fabs.
