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> Microwave plasma source assy, for gasonics/novellus
Microwave plasma source assy, for gasonics/novellus
Gasonics/Novellus Microwave Downstream Plasma Source Assembly, for PEP Iridia, with:
* National Mod. NL 10250-17 magnetron tube
* Astex GL212 power detector assembly (power detector)
* Philips Mod. 2(***) 163 02101 circulator
* Muegge Part Number MW2101A-26 waveguide/tuner assy
* Astex Mod. AX7610-5 Downstream Plasma Source (Rev 1L)
* Sapphire tube Mod. No. 94-3077 installed in plasma source
* AGL Microwave Power supply (11/98), Mod. No. D13765, Output Freq. 2.45GHz, 0-1800W, 190-208VAC/1Ph/50/60Hz/25A, 0-10VDC control signal, 19" rack mount
* One Low Voltage cable is included
Packing charge: Domestic USA palletizing $125, Crating USA or International $250
