Reduce Scrapping and Smelting, Promote Component Reuse > Complete Machines
> 1940 1960
> Cook County
> New
> Comdel CPS500S rf power generator 13.56MHZ 500W
Comdel CPS500S rf power generator 13.56MHZ 500W
Comdel CPS500S RF Power Generator 13.56MHz 500W
* Input power: 208VAC 1phase 50/60Hz 10A
* Output power: adjustable, up to 500W
* Control I/O: 15pin DSub connector
* Dual fan forced air cooling
* Class C linear design assures stability
* ETL Marked and SEMI F47 compliant
* Control circuitry ensures consistency during high VSWR conditions
* Output transistors are beta-matched to assure reliability
* Broadband, low Q circuits inhibit squeeging and self-resonant oscillations
With millions of hours in the field, Comdel s CPS series generators have proven their ability to withstand erratic loads. Patented S-Technology provides optimized amplifier performance for ultra-stable output by reducing power gain changes due to plasma impedance fluctuations. S-Technology helps eliminate headaches from transmission line length, mismatch conditions and process reliability issues.
The CPS series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.
