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> Rudolph auto el iii (3) 2B, 4A ellipsometer/ftm autoel
Rudolph auto el iii (3) 2B, 4A ellipsometer/ftm autoel
Rudolph Auto El III Ellipsometer
Specifications are from a 3rd party and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
Power Requirements: Says 220 but there is a tag below that says setup for 110 (it runs on 110 as well).
* Option 2 sample stage has vertical adjustments plus two-axis tilt adjustments, plus two calibrated orthogonal translations in the plane of the sample. Translation range 1" (2.54 cm), resolution 0.001" (0.025mm) in both directions.
* The optional microspot optics are designed to be attached by the user to the polarizer module. Note that, although the beam cross-section is circulator, the obliquely-illuminated sample area is elliptical - e.g., at 70 angle of incidence, the minor and major axes of the spot are 0.001" and 0.003" respectively.
The Rudolph Auto El III Ellipsometer displays film thickness, index, order thickness, substrate N and K. It has a built in printer as well.
Operating Principle: Null seeking
Operating Wavelength: 632.8 nm
Polarizer or Analyzer: 0.05
* Resolution and accuracy of measured film thickness and film or substrate refractive index depends on the film-substrate system and the film thickness. 3 to 10 Angstroms and 0.01 refractive index units are typical of silicon oxide films on silicon
* Standard Pin Locations 70 0.02 and 90 0.02
Single Film: 15 seconds (typically)
Double Film: 20 seconds (typically)
Display: Displays film thickness, index, order thickness, substrate N and K as well as prompting messages to the operator.
Digital Output: Serial ASCII, RS-232. Rudolph and SEMI Communication Standards
Maximum Sample Size and Mounting Plate: 6" x 6" (15.2 cm x 15.2 cm). Horizontal with vacuum hold down (vacuum source is not supplied)
Sample Stage: The standard sample stage has vertical adjustment plus tilt adjustments about vertex of angle of incidence and about axis formed by intersection of plane of incidence with plane of sample (Option 2 might change this)
Data Reduction: Provides an integral library of unique programs and is easily upgradeable as future programs become available
Autocollimator/Microscope: Microscope magnification 9X. Field of view 15 mm. Internal light source for normal incidence sample illumination.
Thermal Printer: Built-in. Dot-matrix format. Alpha-numeric.
Without laser head: 17 3/8" H x 21 1/4" D x 21 1/2" W
With laser head: 17 3/8" H x 21 1/4" D x 27 1/2" W
* Picture 3 - Readout Display
* Picture 4 - Keypad and Controls
* Picture 6 - Autocollimator Arm
* Picture 9 - RS-232 Communication Interface
* Picture 10 - Power Connection
* Picture 11 - Serial Number Tag
