Reduce Scrapping and Smelting, Promote Component Reuse > Complete Machines
> 1940 1960
> 100 mm silicon wafers with platinum (pt) thin film
100 mm silicon wafers with platinum (pt) thin film
These wafers were brand new and carefully packaged to avoid any contamation. They are double sealed in two cleanroom boxes.
The wafers are 100 mm (4-inch) silicon (100) wafers. They have a thin layer of thermally grown silicon dioxide. The metal thin film is rare metal of Platinum (Pt). The thickness of Platinum is about 200 nm. There is also a thin layer of Titanium (50 nm) between the silicon oxide and platinum for improving adhesion.
These wafers are great for MEMS researcher and materials science research such as Sol-Gel PZT etc.
