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> Double o ring for ag associats heatpulse 4100 for rta
Double o ring for ag associats heatpulse 4100 for rta
Double O Ring can make AG Heatpulse 4100 no oxidation of Ti films
Heatpulse is a Registered Trademark of AG Associates.AG Heatpulse 4100 Series are single-wafer, cassette-to-cassette rapid thermal processors, capable of processing in inert or corrosive ambient. The unit is built for the production environment. AG4100 is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures.
* Wafer Size 4 , 5 and 6 .
* Robot control ability. (Equip Tech. robot with one arm)
* Gold coated aluminum chamber with water cooling
* Radiation heating lamp module
* Multiple cycle processing capability
* Steady Temp Range: 600 C to 1250 C for pyrometer sensor, 100 C to 600 C for Thermocouple.
* Steady state process time 0 to 30000 sec programmable.
* Temp Ramp-up Speed: 10 C to 120 C for wafer. Programmable
* Ramp down speed 10 C - 150 C for wafer
* Robot wafer cycling: 80 Wafers/Hr.
AG 4100 RTA RTP is a versatile tool, which is useful for many applications:
We can also provide our own proprietary AW Control Software and Superior Temperature Control Technology to upgrade the refurbished AG Heatpulse 4100 which provides the following significant advantages
* The new software allows to do either 3",4",6 without changing hardware and robot teaching. It is good for the R&D or small production purpose. 2 or 3 susceptor towers can be put to handle 2 or 3 different wafer size for GaAs or InP wafers.
* New hardware includes: three interface cards with cable, new timer counter with watch dog, Pentium Computer with 17 LCD Monitor, standard keyboard and mouse.
* Robot teach is on the GUI and easy to do the procedure with new concept teaching method.
We can also provide the following refurbished RTP equipment
We are the exclusive licenced manufacture for AG Heatpulse 610. We are manufacturing New AccuThermo AW 610,New AccuThermo AW 810M,originally the AG Heatpulse 610.The AccuThermo AW 610,New AccuThermo AW 810Mhave innovative software and more advanced temperature control technologies.
